A METHOD FOR THE PRODUCTION OF CUBIC BORON NITRIDE-CONTAINING FILMS,申请号EP20090711697-传众专利搜索

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发明名称	A METHOD FOR THE PRODUCTION OF CUBIC BORON NITRIDE-CONTAINING FILMS
摘要
申请公布号	EP2243857(B1)	申请公布日期	2012.12.19
申请号	EP20090711697	申请日期	2009.02.17
申请人	KABUSHIKI KAISHA KOBE SEIKO SHO	发明人	YAMAMOTO, KENJI;OKIMOTO, TADAO
分类号	C23C14/34;C01B21/064;C23C14/06	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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