| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure apparatus in which a robot device can be easily installed by reducing the positional accuracy for installing the robot device that mounts a mask on a mask holder. <P>SOLUTION: An inclination angle θ of a mask M held by a mask holder 12 with respect to the mask holder 12 is preliminarily obtained, and positions of lower light-shielding plates 26a to 26d with respect to the mask M are corrected in accordance with the inclination angle θ, by controlling moving distance of each nut 291 of ball screws 29a, 29b to which both ends of the lower light shielding plates 26a to 26d are rotatably supported. <P>COPYRIGHT: (C)2009,JPO&INPIT |
