发明名称 Localized annealing during semiconductor device fabrication
摘要 A process for the fabrication of semiconductor devices on a substrate, the semiconductor devices including at least one metal layer. The process includes, removing the substrate and applying a second substrate; and annealing the at least one metal layer by application of a beam of electromagnetic radiation on the at least one metal layer.
申请公布号 US8329556(B2) 申请公布日期 2012.12.11
申请号 US20060158678 申请日期 2006.12.19
申请人 YUAN SHU;LIN JING;TINGGI TECHNOLOGIES PRIVATE LIMITED 发明人 YUAN SHU;LIN JING
分类号 H01L21/44;H01L21/46 主分类号 H01L21/44
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