| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a MEMS device which can reduce an influence of static electricity from the outside on a MEMS element having a movable part in order to improve the credibility. <P>SOLUTION: A MEMS device includes a MEMS element having a fixed part and a movable part, a first cap covering a movable part with a predetermined interval and fixed to the MEMS element at the fixed part, and a first ground pad electrically connected to the first cap through a conductive member, arranged on the fixed part, and receiving a supply of ground potential. <P>COPYRIGHT: (C)2013,JPO&INPIT |
