| 摘要 |
<p>[Problem] To provide a method and the like for treating a substrate such that drying-preventing liquid entering a pattern on the substrate can be removed in a relatively short time. [Solution] A substrate (W), which is formed with an irregular pattern on a surface thereof, and to which drying-preventing liquid covering the pattern so as to enter the concave portions thereof adheres, is carried into a treatment container (31); the substrate (W) is then heated, and gas for pressurization or fluid in a high pressure state is supplied into the treatment container (31) to form a high pressure atmosphere in the treatment container (31) before the drying-preventing liquid vaporizes to such a degree that pattern collapse occurs, and place the drying-preventing liquid in a high pressure state while still in the concave portions of the pattern; and thereafter, the fluid in the treatment container (31) is discharged in a high pressure state or in a gaseous state.</p> |
