THz-sensor

摘要

A sensor (100) for sensing electromagnetic radiation in the THz-range, comprising an electrically conducting base wall (102); a tubular electromagnetic waveguide (104) extending from the electrically conducting base wall (102); a first membrane (106) spaced apart from the base wall (102); and a second membrane (108) arranged between the base wall (102) and the first membrane to form a cavity defined by the first membrane (106), the second membrane (108) and the tubular electromagnetic waveguide (104). Absorption of the electromagnetic radiation at at least one of the first and second membranes causes thermal expansion of gas inside the cavity resulting in deflection of at least one of the first and second membranes. The tubular electromagnetic waveguide (104) extends beyond the first membrane (106) so as to reduce the amplitude of any external pressure oscillations such as acoustic waves entering the waveguide before the pressure oscillations reach the first membrane.