发明名称 |
Cassette for receiving substrates |
摘要 |
A cassette for receiving substrates includes a frame, and a plurality of support plates protruding from both lateral sides of the frame, wherein the support plates have a width and length large enough to support the substrates without a bending and an access space for a robot arm to transport the substrates, an area of the access space corresponding to an area of the robot arm. |
申请公布号 |
US8322542(B2) |
申请公布日期 |
2012.12.04 |
申请号 |
US20020322553 |
申请日期 |
2002.12.19 |
申请人 |
PARK MOO YEOL;JUNG SUNG SU;LG DISPLAY CO., LTD. |
发明人 |
PARK MOO YEOL;JUNG SUNG SU |
分类号 |
A47G19/08;G02F1/13;B65D85/86;G02F1/1333;H01L21/673 |
主分类号 |
A47G19/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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