| 发明名称 |
METHOD FOR THE APPLICATION OF A CONFORMAL NANOCOATING BY MEANS OF A LOW PRESSURE PLASMA PROCESS |
| 摘要 |
The invention relates to a conformal nanocoating applied by a low pressure plasma process. The invention also relates to a method for making such a conformal nanocoating on a three-dimensional nanostructure, in particular a three-dimensional structure containing electrically conductive and non-conductive elements. |
| 申请公布号 |
EP2525922(A1) |
申请公布日期 |
2012.11.28 |
| 申请号 |
EP20110704527 |
申请日期 |
2011.01.21 |
| 申请人 |
EUROPLASMA NV |
发明人 |
LEGEIN, FILIP;VANLANDEGHEM, ANTHONY;MARTENS, PETER |
| 分类号 |
B05D7/24;H01J37/32;H01L23/29;H05K3/28 |
主分类号 |
B05D7/24 |
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