Surface analysis and measurement method based on flow resistance of fluid and atomic force microscope using the method

摘要

Provided is a surface analysis and measurement method based on the flow resistance of a fluid. The method comprises: spraying a fluid on the surface of a sample; identifying and determining if a flow resistance value of the fluid colliding with the sample surface is optimal for the measurement of the surface topography of the sample; setting the determined optimal flow resistance value to a reference value and moving the sample in the X-Y axes to allow the entire surface of the sample to be scanned; varying the position of the sample in the Z axis together with the X-Y axis movement to adjust varying flow resistance values of the fluid along the irregular surface topography of the sample to the set flow resistance value during scanning; and expressing the movement ranges of the sample in the X, Y and Z axes as numerical values and representing the numerical values as brightness values on a computer screen to display the surface topography of the sample. Further provided is an atomic force microscope using the method.