FORMING BLOCK COPOLYMER INTO SELF-ASSEMBLED COLUMNS
摘要
A method of self-assembling density multiplied block copolymers (BCP) structures includes applying a block copolymer (BCP) to a feature-imprinted resist layer. The BCP is thermally annealed to laterally segregate the BCP into self-assembled columns of a first polymer block surrounded by a second polymer block.
申请公布号
WO2012106120(A3)
申请公布日期
2012.11.22
申请号
WO2012US21780
申请日期
2012.01.18
申请人
SEAGATE TECHNOLOGY LLC;YANG, XIAOMIN;HU, WEI;YU, ZHAONING;HWU, JUSTIN J.;LEE, KIM Y.
发明人
YANG, XIAOMIN;HU, WEI;YU, ZHAONING;HWU, JUSTIN J.;LEE, KIM Y.