| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a temperature sensor capable of measuring temperature over a wide temperature range with high spatial resolution capability in a large area. <P>SOLUTION: A temperature sensor includes measuring cells. Each of the measuring cells is provided at least with a first measuring thin film transistor, a first capacitive element, a second measuring thin film transistor and a second capacitive element. The first capacitive element is connected to the first measuring thin film transistor, the second capacitive element is connected to the second measuring thin film transistor and a width of the first measuring thin film transistor is different from a width of the second measuring thin film transistor. Since a thin film transistor can be formed in units of micrometers, the temperature sensor that has extremely high spatial resolution capability in a large area can be realized. In addition, since the first measuring thin film transistor and the second measuring thin film transistor measure temperatures in target temperature ranges different from each other, accurate temperature measurement over a wide temperature range can be realized. <P>COPYRIGHT: (C)2013,JPO&INPIT |
