发明名称 SEMICONDUCTOR DEVICE
摘要 A semiconductor device includes: a high dielectric constant gate insulating film formed on an active region in a substrate; a gate electrode formed on the high dielectric constant gate insulating film; and an insulating sidewall formed on each side surface of the gate electrode. The high dielectric constant gate insulating film is continuously formed so as to extend from under the gate electrode to under the insulating sidewall. At least part of the high dielectric constant gate insulating film located under the insulating sidewall has a smaller thickness than a thickness of part of the high dielectric constant gate insulating film located under the gate electrode.
申请公布号 US2012273903(A1) 申请公布日期 2012.11.01
申请号 US201213547913 申请日期 2012.07.12
申请人 HIRASE JUNJI;SEBE AKIO;KOTANI NAOKI;OKAZAKI GEN;AIDA KAZUHIKO;TAKEOKA SHINJI;PANASONIC CORPORATION 发明人 HIRASE JUNJI;SEBE AKIO;KOTANI NAOKI;OKAZAKI GEN;AIDA KAZUHIKO;TAKEOKA SHINJI
分类号 H01L29/78 主分类号 H01L29/78
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