发明名称 MEMS resonator and method of controlling the same
摘要 <p>A resonator (20a,205) in which in addition to the normal anchor (23) at a nodal point, a second anchor (90) arrangement is provided and an associated connecting arm (96) between the resonator body and the second anchor arrangement. The connecting arm connects to the resonator body at a non-nodal point so that it is not connected to a normal position where fixed connections are made. The connecting arm is used to suppress transverse modes of vibration.</p>
申请公布号 EP2515436(A1) 申请公布日期 2012.10.24
申请号 EP20110162888 申请日期 2011.04.18
申请人 NXP B.V. 发明人 VAN DER AVOORT, CASPER;VAN BEEK, JOZEF T. M.
分类号 H03H9/02;H03H9/24 主分类号 H03H9/02
代理机构 代理人
主权项
地址