发明名称 WORK STICKING METHOD AND WORK STICKING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a work sticking device that precisely sticks a work. <P>SOLUTION: A work sticking device 10 which includes a press table 18 and a press head 42 which is arranged above the press table 18 to freely and relatively contact and leave the press table 18, and sticks a work 23 on a plate 22 across wax by pressing the work by the press table 18 and press head 42 is characterized in that the press table 18 includes both a heater 31 and a cooling mechanism 32, and after the wax applied onto the plate 22 is spread by heating the press table 18 and press head 42 and pressing the work 23 across the wax, the cooling mechanism 32 cools the press table 18 and plate 22 to solidify the wax and thereby to stick the work 23 on the plate 22. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012204604(A) 申请公布日期 2012.10.22
申请号 JP20110067799 申请日期 2011.03.25
申请人 FUJIKOSHI MACH CORP 发明人 SAKAI TAKAAKI;TERASAWA MITSUKO;ONISHI SUSUMU
分类号 H01L21/304;B24B37/30 主分类号 H01L21/304
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