| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a laminated piezoelectric element which improves the capability of an oscillatory wave driving device while maintaining the reliability without installing new manufacturing facilities and increasing the manufacturing cost. <P>SOLUTION: A laminated body is formed by laminating a first sheet where an internal electrode 5 is formed, a second sheet where a conductive film for wiring is formed, and a third sheet where a first through hole and a surface electrode film for polarization are formed. A direct current voltage is applied to the surface electrode film for the polarization, thereby polarizing the laminated body through the first through hole and the conductive film for the wiring 2. A part of the laminated body is eliminated, thereby eliminating the first through hole and a surface electrode for polarization and exposing an end part of the conductive film for the wiring 2 on an outer peripheral surface of the laminated body to manufacture a laminated piezoelectric element 1. <P>COPYRIGHT: (C)2013,JPO&INPIT |
