| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element with high reliability. <P>SOLUTION: The piezoelectric element includes: a first electrode 10; an insulator layer 20 formed above the first electrode 10 and having a through-hole 22 formed thereon; a piezoelectric layer 30 having a first part 32 formed inside the through-hole 22 and above the through-hole 22 and a second part 34 formed above the insulator layer 20; a second electrode 40 formed above the first part 32 and the second part 34. The second part 34 encloses the surroundings of the first part 32, and a side surface 36 of the piezoelectric layer 30 is connected with a top surface 24 of the insulator layer 20. <P>COPYRIGHT: (C)2013,JPO&INPIT |
