发明名称 |
Electromechanical device with optical function separated from mechanical and electrical function |
摘要 |
A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element. |
申请公布号 |
US8289613(B2) |
申请公布日期 |
2012.10.16 |
申请号 |
US201113086113 |
申请日期 |
2011.04.13 |
申请人 |
CHUI CLARENCE;CUMMINGS WILLIAM;GALLY BRIAN;KOGUT LIOR;TUNG MING-HAU;TUNG YEH-JIUN;CHIANG CHIH-WEI;ENDISCH DENIS;QUALCOMM MEMS TECHNOLOGIES, INC. |
发明人 |
CHUI CLARENCE;CUMMINGS WILLIAM;GALLY BRIAN;KOGUT LIOR;TUNG MING-HAU;TUNG YEH-JIUN;CHIANG CHIH-WEI;ENDISCH DENIS |
分类号 |
G02B26/00;B81C99/00 |
主分类号 |
G02B26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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