| 摘要 |
<p>PURPOSE: A ceiling electrode plate and a substrate processing apparatus are provided to improve heat transfer efficiency between a cooling plate and the ceiling electrode plate by arranging a heat transfer sheet on a contact side of the ceiling electrode plate and the cooling plate. CONSTITUTION: A DC power supply is connected to a ceiling electrode plate(31) of a shower head. A heat transfer sheet(38) is arranged on a contact side of a cooling plate and a supporter. A plurality of gas holes(34) is formed on the ceiling electrode plate. Openings(41) corresponding to the gas holes is formed on the heat transfer sheet. A film thickness of the A heat transfer sheet is 30μm to 80μm.</p> |
