| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a wire driving type conveying apparatus allowing cost reduction, and to provide a method of controlling the wire driving type conveying apparatus. <P>SOLUTION: The wire driving type conveying apparatus includes a stage 3, a driving apparatus 4, a tensioning apparatus 5, and a control apparatus 7. The driving apparatus 4 includes a first wire 12 connected to the stage 3, a first motor 11 which winds up and delivers the first wire 12 by its rotation to thereby move the stage 3, and a first rotary encoder 13 for detecting rotation of the first motor 11. The tensioning apparatus 5 adds constant tension to the wire 12. The control apparatus 7 has a calculation part 32 for calculating an extension/contraction amount of the first wire 12 from the rotation of the first motor 11 detected by the first rotary encoder 13, and a correction amount for correcting the position of the stage 3 from the extension/contraction amount, and causes the motor to drive on the basis of the correction amount. <P>COPYRIGHT: (C)2013,JPO&INPIT |
