| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrostatic actuator which reduces a pull-in voltage, secures the creep resistance, and improves hot switching performance. <P>SOLUTION: According to an embodiment of this invention, an electrostatic actuator including a substrate, an electrode part, a film body part, and biasing parts is provided. The electrode part is provided on the substrate. The film body part is provided so as to face the electrode part and has conductivity. Each biasing part has a connection part connected with the substrate and elastic parts provided between the connection part and the film body part and supports the film body part. The electrode part and the film body part may contact with each other or separate from each other according to a voltage applied to the electrode part. Each elastic part has branch parts between one end connecting with the connection part and the other ends connecting with the film body part. <P>COPYRIGHT: (C)2013,JPO&INPIT |
