USE OF PHOTORESIST MATERIAL AS AN INTERSTITIAL FILL FOR PZT PRINTHEAD FABRICATION

摘要

PURPOSE: The usage of a photo-resist material as a gap filler for manufacturing a PZT print head is provided to manufacture a high density inkjet print head assembly with an external manifold by using a new processing method. CONSTITUTION: A method for forming an inkjet print head is as follows. A plurality of piezoelectric elements is attached on a diaphragm. Gaps between adjacent piezoelectric elements are charged and a photo-sensitive gap layer is distributed to contact to the diaphragm. A first portion of the photo-sensitive gap layer within the gaps between the adjacent piezoelectric elements is eliminated while leaving a second portion of the photo-sensitive gap layer within the gaps between the adjacent piezoelectric elements. An electronic passage is provided between each piezoelectric element and electrodes attached to the piezoelectric elements by attaching the plurality of piezoelectric elements to a plurality of the electrodes in the state that the second portion of the photo-sensitive gal layer within the gaps between the adjacent piezoelectric elements.