| 摘要 |
<P>PROBLEM TO BE SOLVED: To handle a sheet-like workpiece without damaging it at high speed. <P>SOLUTION: A chucking device includes: a chuck body 10 where a workpiece suction surface 13 with which a sheet-like electrode plate W comes in contact, a vacuum suction cavity 12a sucked by vacuum, and a suction opening communicating from the workpiece suction surface to the vacuum suction cavity; and a three-way valve 20 having a valve case 24 where first to third openings 21 to 23 are formed and a flow path for interconnecting the openings is formed and having a valve body 25 moving in the valve case. The chuck body 10 and the valve case 24 of the three-way valve 20 are integrally formed. <P>COPYRIGHT: (C)2013,JPO&INPIT |
