发明名称 NONVOLATILE MEMORY DEVICE AND METHOD OF FABRICATING THE SAME
摘要 <p>PURPOSE: A nonvolatile memory device and a manufacturing method thereof are provided to obtain a channel length of a memory cell without increasing the width of a floating gate. CONSTITUTION: A substrate(100) has an active area(100A) defined by an element isolation film(110). A floating gate(130) is projected to the top of the substrate while touching one sidewall of the active area. An inter gate insulating film(140) is formed on the floating gate. A control gate(150) is formed between the intergate insulating film. The control gate touches the sidewall of the floating gate while having an interposed intergate insulating film.</p>
申请公布号 KR20120107639(A) 申请公布日期 2012.10.04
申请号 KR20110025261 申请日期 2011.03.22
申请人 SK HYNIX INC. 发明人 LEE, NAM JAE;SEIICHI ARITOME
分类号 H01L27/115;H01L21/8247 主分类号 H01L27/115
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