发明名称 |
NONVOLATILE MEMORY DEVICE AND METHOD OF FABRICATING THE SAME |
摘要 |
<p>PURPOSE: A nonvolatile memory device and a manufacturing method thereof are provided to obtain a channel length of a memory cell without increasing the width of a floating gate. CONSTITUTION: A substrate(100) has an active area(100A) defined by an element isolation film(110). A floating gate(130) is projected to the top of the substrate while touching one sidewall of the active area. An inter gate insulating film(140) is formed on the floating gate. A control gate(150) is formed between the intergate insulating film. The control gate touches the sidewall of the floating gate while having an interposed intergate insulating film.</p> |
申请公布号 |
KR20120107639(A) |
申请公布日期 |
2012.10.04 |
申请号 |
KR20110025261 |
申请日期 |
2011.03.22 |
申请人 |
SK HYNIX INC. |
发明人 |
LEE, NAM JAE;SEIICHI ARITOME |
分类号 |
H01L27/115;H01L21/8247 |
主分类号 |
H01L27/115 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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