| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a spectral characteristic measuring apparatus in which reduction of reliability caused by disturbance is suppressed, a control method thereof, a spectral characteristic measuring method and an optical path length difference elongation/contraction mechanism. <P>SOLUTION: Beams emitted from a measuring point of an object to be measured toward various directions are collected into one and guided to a first reflection unit and a second reflection unit by a split optical system, and disturbance affecting relative positions of the first reflection unit and the second reflection unit is estimated. While elongating/contracting an optical path length difference between first reflection light reflected by the first reflection unit and second reflection light reflected by the second reflection unit by moving at least one of the first reflection unit and the second reflection unit so as to cancel the disturbance, an image forming optical system guides the first reflection light and the second reflection light to the same point, interferogram at the measuring point of the object to be measured is determined on the basis of an interference light intensity change at that point, and Fourier transform is performed on the interferogram, thereby acquiring a spectrum. <P>COPYRIGHT: (C)2012,JPO&INPIT |
