发明名称 AN -NH- TERMINATED SILICON SURFACE AND A METHOD FOR ITS PREPARATION
摘要 A uniform Si-NH-Si terminated Si(111) surface is formed by contacting a chlorine-terminated silicon surface with ammonia and a solvent such as an ether.
申请公布号 WO2012071296(A3) 申请公布日期 2012.09.27
申请号 WO2011US61588 申请日期 2011.11.21
申请人 UNIVERSITY OF DELAWARE;TIAN, FANGYUAN;TABER, DOUGLASS, F.;TEPLYAKOV, ANDREW, V. 发明人 TIAN, FANGYUAN;TABER, DOUGLASS, F.;TEPLYAKOV, ANDREW, V.
分类号 H01L21/302;H01L21/306 主分类号 H01L21/302
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