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发明名称
COATING FILM FORMING DEVICE, USAGE OF COATING FILM FORMING DEVICE AND STORAGE MEDIUM
摘要
申请公布号
KR101186374(B1)
申请公布日期
2012.09.26
申请号
KR20080041630
申请日期
2008.05.06
申请人
发明人
分类号
H01L21/027;B05D1/40;G03F7/16;H01L21/08
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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