| 摘要 |
<p>A valve includes a silicon substrate having first and second surfaces, a channel having an opening extending between both surfaces of the silicon substrate, and a metal pattern on the first surface of the silicon substrate. The metal pattern surrounds the opening on the first surface of the silicon substrate but does not close the opening. In addition, a low melting point metal member is disposed on the surface of the silicon substrate. The low melting point metal member covers at least a part of the metal pattern and completely closes the opening on the first surface of the silicon substrate.</p> |
