SUBSTRATE FOR SEMICONDUCTOR LIGHT EMITTING DEVICE AND METHOD OF MANUFACTURING THE SAME

摘要

PURPOSE: A substrate for a semiconductor light emitting device and a manufacturing method thereof are provided to have various scattering faces by including a protrusion with a convex side and a concave side. CONSTITUTION: An etching mask(A) is formed on a substrate(10) using a photolithography process. A cone type protrusion(11a) is formed on the substrate by etching. The substrate is a sapphire substrate and used for the growth of a semiconductor layer(20). A protrusion(11) is formed by wet etching.