| 摘要 |
A protective filter for vacuum pump comprises: a casing being supplied exhaust gas including microparticles through an exhaust pipe and accommodating microparticle collection liquid inside; a rotating drum having a rotating cylinder and a basket, being filled a filler, the exhaust gas supplied into the casing flows into the rotating cylinder contacting the microparticle collection liquid at a surface of the filler, the exhaust gas is discharged through an opening provided at one end of the rotating cylinder; a roller rotating the basket; and a connecting pipe having an opening facing the opening of the rotating cylinder, fixed to the casing, and connected to the vacuum pump. |
