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发明名称
摘要
申请公布号	JP5028044(B2)	申请公布日期	2012.09.19
申请号	JP20060203478	申请日期	2006.07.26
申请人		发明人
分类号	H01L21/205;C23C16/458;C23C16/505	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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