CONDITIONER FOR SOFT PAD AND METHOD FOR PRODUCING THE SAME

摘要

PURPOSE: A conditioner for a soft pad and a manufacturing method thereof are provided to reduce manufacturing costs by omitting a CVD diamond coating process. CONSTITUTION: A substrate has one flat surface. A plurality of cut tips are separately formed on the entire or part of the surface. The upper sides of the cut tips are composed of a surface, a line or a point. The substrate has a thickness which exceeds a protrusion height of the cut tip. One surface of the substrate is precisely grounded and lapped. [Reference numerals] (AA) PWR retention; (BB) Pad Wear Rate Percentage(%); (CC) Time(hr); (DD) Conventional conditioner; (EE) CVD Diamond coating conditioner; (FF) Conditioner for a soft pad