发明名称 Process for making a GaN substrate
摘要 In some embodiments, the invention relates to a process for making a GaN substrate comprising: transferring a first monocrystal GaN layer onto a supporting substrate; applying crystal growth for a second monocrystal GaN layer on the first layer; the first and second GaN layers thereby forming together the GaN substrate, the GaN substrate having a thickness of at least 10 micrometers, and removing at least one portion of the supporting substrate.
申请公布号 US8263984(B2) 申请公布日期 2012.09.11
申请号 US20070310345 申请日期 2007.11.11
申请人 FAURE BRUCE;SOITEC 发明人 FAURE BRUCE
分类号 H01L29/15;C30B25/00;H01L21/30 主分类号 H01L29/15
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