发明名称 METHOD OF FLIP CHIP MOUNTING
摘要 <P>PROBLEM TO BE SOLVED: To provide a flip chip mounting method capable of efficiently mounting a semiconductor chip on a circuit board. <P>SOLUTION: The flip chip mounting method includes a chip preparation step in which a semiconductor chip 10 which contains a salient electrode 2 on a circuit surface S, with an insulating resin layer 3 formed on the circuit surface S, is placed on a support fitting 6 with the circuit surface S looking downward, a chip pick up step in which a sucking tool 7 which contains a sucking surface provided with an air-sucking hole on a lower surface is caused to approach the semiconductor chip 10 placed on the support fitting 6 from above, and at the position where the sucking surface does not contact to the semiconductor chip 10, the semiconductor chip 10 is picked up from the support fitting 6 by air-sucking through the air-sucking hole, to be sucked to the sucking surface in non-contact manner, and a chip mounting step in which the circuit surface S of the semiconductor chip 10 is caused to pressurize the circuit board 4 by the sucking tool 7 while the semiconductor chip 10 is heated, so that the circuit board 4 and the semiconductor chip 10 are electrically connected to each other. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012174861(A) 申请公布日期 2012.09.10
申请号 JP20110034782 申请日期 2011.02.21
申请人 SEKISUI CHEM CO LTD 发明人
分类号 H01L21/60;H01L21/56 主分类号 H01L21/60
代理机构 代理人
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