SEMICONDUCTOR DEVICE AND PROCESS OF PRODUCING SAME, AND DISPLAY DEVICE

摘要

A semiconductor device is produced, which comprises: a semiconductor layer; multiple electrode parts each of which is overlaid on the semiconductor layer; and an insulating layer which is arranged between the multiple electrode parts and is superposed on the semiconductor layer. A process of producing the semiconductor device comprises: a step of forming an oxide semiconductor layer which is partly covered with an insulating film; a step of forming a conductive material layer which covers the oxide semiconductor layer and the insulating film; a step of forming multiple electrode parts from the conductive material layer by photolithography and plasma dry etching and exposing a part of the oxide semiconductor layer from the multiple electrode parts and the insulating film; and a step of removing the part of the oxide semiconductor layer exposed from the multiple electrode parts and the insulating film to form a semiconductor layer.