发明名称 |
VACUUM CHAMBERS WITH SHARED PUMP |
摘要 |
Embodiments of the present disclosure generally relate to vacuum processing chambers having different pumping requirements and connected to a shared pumping system through a single foreline. In one embodiment, the vacuum processing chambers include a high conductance pumping conduit and a low conductance pumping conduit coupled to a single high conductance foreline. In another embodiment, a plurality of unbalanced chamber groups may be connected to a common pumping system by a final foreline. |
申请公布号 |
US2012222813(A1) |
申请公布日期 |
2012.09.06 |
申请号 |
US201213408810 |
申请日期 |
2012.02.29 |
申请人 |
PAL ANIRUDDHA;SALINAS MARTIN JEFFREY;LEE JARED AHMAD;REUTER PAUL B.;YOUSIF IMAD;APPLIED MATERIALS, INC. |
发明人 |
PAL ANIRUDDHA;SALINAS MARTIN JEFFREY;LEE JARED AHMAD;REUTER PAUL B.;YOUSIF IMAD |
分类号 |
C23C16/455;B05B1/18;B05C5/02;B05C11/00;C23C16/50 |
主分类号 |
C23C16/455 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|