发明名称 SEMICONDUCTOR DEVICE AND TESTING METHOD OF THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a technology for inhibiting a large current from flowing partially through a semiconductor chip. <P>SOLUTION: A semiconductor device comprises a semiconductor chip 1 having a gate electrode 5 and a stress detection element 7 provided on a surface of the semiconductor chip 1 to detect a stress applied to the surface. The semiconductor device controls a control signal applied to the gate electrode 5 on the basis of a stress detected by the stress detection element 7. Further, it is preferable that a first stress detection element 7-1 is provided as the stress detection element 7 detecting stress applied to the center of the semiconductor chip 1 when viewed from above, and a second stress detection element 7-2 is provided as the stress detection element 7 detecting stress applied to an outer periphery of the semiconductor chip 1 when viewed from above. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012169524(A) 申请公布日期 2012.09.06
申请号 JP20110030756 申请日期 2011.02.16
申请人 MITSUBISHI ELECTRIC CORP 发明人 NARASAKI ATSUSHI
分类号 H01L21/822;G01L1/18;H01L21/336;H01L21/66;H01L27/04;H01L29/739;H01L29/78;H01L29/84 主分类号 H01L21/822
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