Method of manufacturing batches of temperature or strain sensors without calibration by matching resonators

摘要

#CMT# #/CMT# The method involves fabricating two series of resonators on substrates, respectively. A series of electrical measurements of the two series of resonators is performed to determine pairs of resonant frequencies and capacitances of each resonator, respectively. A series of matching of the resonators is performed according to an aggregate of two criteria defining that dispersion on difference of resonant frequencies is less than a threshold value and dispersion on difference of static capacitances is less than another threshold value. #CMT#USE : #/CMT# Method for collective fabrication of remotely interrogatable sensors e.g. passive calibration-free surface acoustic wave (SAW) sensors such as temperature sensors (claimed). #CMT#ADVANTAGE : #/CMT# The method permits efficient fabrication of the sensors retaining acceptable measurement precision. The method performs the series of matching of the resonators, so as to reduce the temperature law dispersions and maintain high yields. #CMT#DESCRIPTION OF DRAWINGS : #/CMT# The drawing shows a schematic view of a resonator structure. a : Electrode width Ac : Axis Ei : Inter-digitated electrode combs h : Metallization thicknesses P : Metallization period #CMT#INDUSTRIAL STANDARDS : #/CMT# The substrates are defined by cut angles according to IEEEstandard.