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发明名称
SELF-IONIZED AND INDUCTIVELY-COUPLED PLASMA FOR SPUTTERING AND RESPUTTERING
摘要
申请公布号
KR101179726(B1)
申请公布日期
2012.09.04
申请号
KR20107009485
申请日期
2002.11.14
申请人
发明人
分类号
C23C14/34;C23C14/06;C23C14/35;C25D5/02;H01L21/28;H01L21/285;H01L21/768
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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