| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor unit using Coriolis force and a signal detection method for the same capable of restraining degradation of detection accuracy of the angular velocity sensor unit. <P>SOLUTION: An angular velocity sensor unit has a package housing an oscillatory type sensor element 1 to detect angular velocity and an IC 2 to control the sensor element 1. The sensor element 1 has: oscillation arms 5 provided with drive electrodes 6, monitor electrodes 7 and sense electrodes 8; and support arms 16 which support the oscillation arms 5 and are provided with correction electrodes 20 on wiring electrodes 19 for the monitor electrodes 7. Thus, the sensor element 1 has a structure enabling an unnecessary signal generated in the monitor electrode 7 due to unnecessary oscillation to be attenuated by a correction signal generated in the correction electrode 20 due to the same unnecessary oscillation. <P>COPYRIGHT: (C)2012,JPO&INPIT |
