| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent displacement of a contact electrode of a probe device from an electrode of a body to be inspected. <P>SOLUTION: The probe device includes a flexible wiring sheet, a support body supporting the wiring sheet, and a gap maintaining member attached to the wiring sheet. The wiring sheet includes a plurality of wires provided on one surface thereof and a plurality of contact electrodes provided on the wires. The gap maintaining member has a thermal expansion coefficient lower than that of the wiring sheet and rigidity higher than that of the wiring sheet and is attached to the wiring sheet to maintain gaps between the plurality of wires in a state where the wiring sheet is expanded. <P>COPYRIGHT: (C)2012,JPO&INPIT |
