| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a static pressure gas bearing linear guide device in which a movable body has a tubeless structure since a compressed air for floating the movable body is jetted from a guide rail. <P>SOLUTION: The guide device includes a guide rail 2 fixed to a base stage, a movable body 4 (vertical receiving plate 42 and horizontal receiving plate 44) capable of reciprocating along the extending direction of the guide rail 2, a static pressure gas bearing part (porous member) 6 which jets the compressed air to float the movable body 4 from the guide rail 2, for no-contacting support, and an attracting part 8 (magnetic attraction member 8a and permanent magnet 8b) which attracts the movable body 4 to the guide rail 2 by magnetic attraction force. The static pressure gas bearing part 6 is arranged at the guide rail 2 and the compressed air is jetted toward the movable body 4, such that a balance is established by adjusting the floating force against the guide rail 2 of the movable body 4 from the guide rail 2 under the compressed air from the static gas bearing part 6 and the magnetic attraction force from the attraction part 8 that attracts the movable body 4 to the guide rail 2, so that the movable body 4 is floated from the guide rail 2, for reciprocation. <P>COPYRIGHT: (C)2012,JPO&INPIT |
