发明名称 |
TUNING HARDWARE FOR PLASMA ASHING APPARATUS AND METHODS OF USE THEREOF |
摘要 |
A continuously variable microwave circuit capable of being tuned to operate under a plurality of distinct operating conditions, comprising: a waveguide comprising an adjustable tuning element having a core configured to protrude into the waveguide; an actuator in operative communication with the adjustable tuning element, wherein the actuator is operable to selectively vary a length of the core that is protruding into the waveguide so as to minimize reflected microwave power in the plasma asher; and a controller in operative communication with the actuator, wherein the controller is configured to selectively activate the actuator upon a change in the plurality of operating conditions. |
申请公布号 |
KR20120095972(A) |
申请公布日期 |
2012.08.29 |
申请号 |
KR20127015178 |
申请日期 |
2010.11.12 |
申请人 |
AXCELIS TECHNOLOGIES, INC. |
发明人 |
SRIVASTAVA ASEEM;COUILLIARD ROBERT |
分类号 |
H01J37/32 |
主分类号 |
H01J37/32 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|