发明名称 Gallium nitride bulk crystals and their growth method
摘要 A gallium nitride crystal with a polyhedron shape having exposed {10-10} m-planes and an exposed (000-1) N-polar c-plane, wherein a surface area of the exposed (000-1) N-polar c-plane is more than 10 mm2 and a total surface area of the exposed {10-10} m-planes is larger than half of the surface area of (000-1) N-polar c-plane. The GaN bulk crystals were grown by an ammonothermal method with a higher temperature and temperature difference than is used conventionally, and using an autoclave having a high-pressure vessel with an upper region and a lower region. The temperature of the lower region of the high-pressure vessel is at or above 550° C., the temperature of the upper region of the high-pressure vessel is set at or above 500° C., and the temperature difference between the lower and upper regions is maintained at or above 30° C. GaN seed crystals having a longest dimension along the c-axis and exposed large area m-planes are used.
申请公布号 US8253221(B2) 申请公布日期 2012.08.28
申请号 US20080234244 申请日期 2008.09.19
申请人 HASHIMOTO TADAO;NAKAMURA SHUJI;THE REGENTS OF THE UNIVERSITY OF CALIFORNIA 发明人 HASHIMOTO TADAO;NAKAMURA SHUJI
分类号 H01L29/20 主分类号 H01L29/20
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