发明名称 PROCEDE DE REALISATION D?UN CIRCUIT INTEGRE
摘要 A process for producing an integrated circuit on the surface of a substrate, the process including: producing a first layer, including active zones and insulating zones, on the surface of the substrate; producing gate zones on the surface of the first layer, the gate zones each being surrounded by insulating spacers; producing source/drain electrodes; producing a dielectric layer between the insulating spacers, the dielectric layer having an upper surface level with the upper surfaces of the gate zones; partially etching each gate zone so as to lower the upper surface of a first part of each gate zone; and depositing an insulating dielectric layer on the first parts of the gate zones.
申请公布号 FR2963161(B1) 申请公布日期 2012.08.24
申请号 FR20100056070 申请日期 2010.07.23
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES;STMICROELECTRONICS (GRENOBLE 2) SAS 发明人 POIROUX THIERRY;BARNOLA SEBASTIEN;MORAND YVES
分类号 H01L21/82 主分类号 H01L21/82
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