Laser-based maintenance apparatus for inspecting flaws based on a generated surface wave

摘要

A surface inspecting method including irradiating a laser light to a test object to generate an ultrasonic wave, irradiating a second laser light at a position apart by a known distance from a position where the laser light is irradiated and receiving a reflection light thereof, and correcting a generation surface wave of a received ultrasonic wave by using an ultrasonic wave other than the generation surface wave to thereby detect a flaw of the test object. A characterization of the generation surface wave is divided or integrated by the same characterization of the ultrasonic wave other than the generation surface wave included in an output signal to obtain a performance index value and obtain a depth of the flaw by applying the performance index value to a calibration curve in which a corresponding relation between the performance index value and the depth of the flaw is obtained preliminarily.