发明名称 Semiconductor device and manufacturing method thereof
摘要 An isolation layer for suppressing a leakage current is provided at least between a channel layer and a buffer layer formed under the channel layer in the buffer layer.
申请公布号 US8247844(B2) 申请公布日期 2012.08.21
申请号 US20090574995 申请日期 2009.10.07
申请人 OISHI TOSHIYUKI;YAMAMOTO YOSHITSUGU;OTSUKA HIROSHI;YAMANAKA KOJI;INOUE AKIRA;MITSUBISHI ELECTRIC CORPORATION 发明人 OISHI TOSHIYUKI;YAMAMOTO YOSHITSUGU;OTSUKA HIROSHI;YAMANAKA KOJI;INOUE AKIRA
分类号 H01L31/0328;H01L31/0336;H01L31/072;H01L31/109 主分类号 H01L31/0328
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