| 摘要 |
<p>PURPOSE: A mold substrate and a method for inspecting the same are provided to prevent a mismatch of a pattern location in a pattern transfer process. CONSTITUTION: A circular mold substrate(1) is prepared. An uneven pattern is formed on the surface of a substrate. The thickness variation of the substrate is 10 um or less. The substrate comprises an upper surface(2), a lower surface(3), and a lateral surface(4). A chamfer(5) is respectively formed in a boundary of the lower surface, the upper surface, and the lateral surface of the substrate.</p> |
