发明名称 SYSTEM AND METHOD FOR CORRECTING FOR PRESSURE VARIATION USING MOTOR
摘要 <P>PROBLEM TO BE SOLVED: To provide systems and methods for compensating for pressure increase that may occur in various enclosed spaces of a pumping apparatus. <P>SOLUTION: Embodiments of the present invention may compensate for pressure increases in chambers of the pumping apparatus by moving a pumping means of the pumping apparatus to adjust the volume of the chamber to compensate for the pressure increase in the chamber. More specifically, in one embodiment, to account for unwanted pressure increases to the fluid in a dispense chamber the dispense motor may be reversed to back out piston to compensate for any pressure increase in the dispense chamber. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012154337(A) 申请公布日期 2012.08.16
申请号 JP20120085238 申请日期 2012.04.04
申请人 ENTEGRIS INC 发明人 GONNELLA GEORGE;CEDRONE JAMES;ZAGARS RAYMOND A;MCLOUGHLIN ROBERT F
分类号 F04B43/02;F04B11/00;F04B43/04 主分类号 F04B43/02
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