发明名称 METHOD FOR REDUCING CONCENTRATION OF ACCEPTORS IN CRYSTALSWITH NATIVE DEFECTS
摘要 The invention relates to material engineering and can be used in radioelectronics, semiconductor and optoelecronic instrument making, in particular in manufacturing infrared devices. Disclosed is a method for reducing concentration of acceptors in crystals with native defects, in which crystals are grown using Bridgman vertical method or solid-state recrystallization, moreover the middle part of the grown crystal is cut; the manufactured crystals are cut in the form of parallelepiped with dimensions ofmm, mechanically finished and chemically polished in brome-mental etchant 5 % Br+ 95 % CHOH, and deformed by a dynamic loading along a long rib under the room temperature up to relative deformation, thereafter the deformed layer enriched with dislocations is chemically etched for a thickness of 100-200 μm. The technical result of the invention is reducing concentration of acceptors in crystals with native defects.
申请公布号 UA99369(C2) 申请公布日期 2012.08.10
申请号 UA20100014881 申请日期 2010.12.13
申请人 LVIV IVAN FRANKO NATIONAL UNIVERSITY 发明人 KOMAN BOHDAN PETROVYCH;MOROZOV LEONID MYKHAILOVYCH;PYSAREVSKYI VOLODYMYR KOSTIANTYNOVYCH
分类号 H01L21/02;H01L21/368;H01L31/102;H01L31/103;H01L31/18 主分类号 H01L21/02
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