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发明名称
摘要
申请公布号
JP4994527(B2)
申请公布日期
2012.08.08
申请号
JP20000213186
申请日期
2000.07.13
申请人
发明人
分类号
C30B15/10;C30B29/06;H01L21/208
主分类号
C30B15/10
代理机构
代理人
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地址
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